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Microscopy and Microanalysis » Instrumentation » SEM » FEI Quanta 200 ESEM FEG
FEI Quanta 200 ESEM FEG
 

The Quanta 200 ESEM FEG from FEI is a special type of high performance scanning electron microscope (SEM). It is equipped with a Schottky field emission gun (FEG) for optimal spatial resolution. The instrument can be used in high vacuum mode (HV), low-vacuum mode (LV) and the so called ESEM (Environmental SEM) mode.This makes it possible to study samples in pressures up to 5 Torr. The microscope is equipped with an Oxford Inca Energy Dispersive X-ray (EDX) system for chemical analysis. Qualitative and quantitative analysis, elemental mapping and linescans can be performed. The microscope can also be equipped with a peltier stage for studies of wet samples in-situ. There are two heating stages available for in-situ heating experiments up to 1500°C. This can be done in combination with having an external gas present in the chamber, e.g. air, for studying chemical reactions, such as oxidation, at high temperatures.

Instrument data:
 
Spatial Resolution
30 kV: 2.0 nm
15 kV: 2.1 nm
8 kV: 2.5 nm
3 kV: 3.5 nm
1 kV: 5 nm
500 V: 7 nm (at 7 mm)

Operating voltage: 0,5-30kV
Gun: Field emission gun (FEG)
Equipped with: Oxford Inca 300 EDX system, Peltier stage (-20°C - +100°C)






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www.fy.chalmers.se
www.chalmers.se
Microscopy and Microanalysis
Applied Physics

Chalmers University of Technology
SE-412 96  Göteborg
Visiting address: Fysikgränd 3, ground floor
Tel 031-772 5473
Last modified: 2009-11-27

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