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TEM
SEM
Leo Ultra 55 FEG
FEI Quanta 200 ESEM FEG
FIB
APFIM
SEM  
Microscopy and Microanalysis » Instrumentation » SEM
Scanning electron microscopy (SEM)
 
Optical microscopes use light to produce an image. Diffraction of the incident light limits the resolution of the microscope, so that the smallest things we can observe are in the same size regime as the wavelength of visible light, which spans from about 380 to 780 nm. In order to see smaller things than this, we have to use some other technique.

Thanks to the duality of quantum physics, which states that any particle, including an electron, can have both wave and particle properties, electrons can be used instead of photons to produce an image. Since electrons can have much higher energy than photons, they can also have much smaller wavelengths. The resolution can therefore be drastically improved compared to that of an optical microscope.

In a scanning electron microscope, the electron beam is scanned across the surface of interest. The impact of the beam with the surface generates a cascade of electrons that are scattered in all directions. The amount of electrons generated at the surface, and their energy, depend on the topography and on the elements that the analyzed material consists of. Thus, both topographic and elemental information can be obtained.

We have two SEMs:
Leo Ultra 55 FEG
FEI Quanta 200 ESEM FEG






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www.fy.chalmers.se
www.chalmers.se
Microscopy and Microanalysis
Applied Physics

Chalmers University of Technology
SE-412 96  Göteborg
Visiting address: Fysikgränd 3, ground floor
Tel 031-772 5473
Last modified: 2009-11-27

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