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APFIM
1DAP
3DAP
APFIM  
Microscopy and Microanalysis » Instrumentation » APFIM
Atom probe field ion microscopy (APFIM)
 
The atom probe is an instrument of analysis with atomic resolution. During the analysis, atoms are pulled off, by field evaporation, from the specimen and mass analysed by a mass spectrometer. In order to achieve field evaporation a DC voltage is applied on a conductive, needle-shaped specimen, with a radius between 50nm to 100 nm.

The analysed volume is cone shaped, typically with a diameter of 2-15 nm and a length up to several hundred nanometres. The 3-dimensional atom probe (3DAP) has a position sensitive detector, which gives the possibility of reconstructing the analysed volume in three dimensions, with special software. In the 1-dimensional atom probe (1DAP), the diameter is only a few nanometres and the chemical identity is only determined in one dimension (depth profile).

By introducing noble gas (Ne, He) into the chamber of analysis, field ion microscopy can be conducted. When the DC voltage is applied to the specimen, the gas atoms are ionized at the specimen surface. The ionized atoms are projected radially to a screen where the field ion image is formed. This technique has a magnification in the order of one million times and the images have an atomic resolution


We have two APFIMs:
1DAP
3DAP




2009
Okt
1T
2F
3L
4S
5M41
6T
7O
8T
9F
10L
11S
12M42
13T
14O
15T
16F
17L
18S
19M43
20T
21O
22T
23F
24L
25S
26M44
27T
28O
29T
30F
31L
Nov
1S
2M45
3T
4O
5T
6F
7L
8S
9M46
10T
11O
12T
13F
14L
15S
16M47
17T
18O
19T
20F
21L
22S
23M48
24T
25O
26T
27F
28L
29S
30M49
Dec
1T
2O
3T
4F
5L
6S
7M50
8T
9O
10T
11F
12L
13S
14M51
15T
16O
17T
18F
19L
20S
21M52
22T
23O
24T
25F
26L
27S
28M53
29T
30O
31T
www.fy.chalmers.se
www.chalmers.se
Microscopy and Microanalysis
Applied Physics

Chalmers University of Technology
SE-412 96  Göteborg
Visiting address: Fysikgränd 3, ground floor
Tel 031-772 5473
Last modified: 2005-06-21

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