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APFIM
1DAP
3DAP
APFIM  
Microscopy and Microanalysis » Instrumentation » APFIM
Atom probe field ion microscopy (APFIM)
 
The atom probe is an instrument of analysis with atomic resolution. During the analysis, atoms are pulled off, by field evaporation, from the specimen and mass analysed by a mass spectrometer. In order to achieve field evaporation a DC voltage is applied on a conductive, needle-shaped specimen, with a radius between 50nm to 100 nm.

The analysed volume is cone shaped, typically with a diameter of 2-15 nm and a length up to several hundred nanometres. The 3-dimensional atom probe (3DAP) has a position sensitive detector, which gives the possibility of reconstructing the analysed volume in three dimensions, with special software. In the 1-dimensional atom probe (1DAP), the diameter is only a few nanometres and the chemical identity is only determined in one dimension (depth profile).

By introducing noble gas (Ne, He) into the chamber of analysis, field ion microscopy can be conducted. When the DC voltage is applied to the specimen, the gas atoms are ionized at the specimen surface. The ionized atoms are projected radially to a screen where the field ion image is formed. This technique has a magnification in the order of one million times and the images have an atomic resolution


We have two APFIMs:
1DAP
3DAP




2012
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www.fy.chalmers.se
www.chalmers.se
Microscopy and Microanalysis
Applied Physics

Chalmers University of Technology
SE-412 96  Göteborg
Visiting address: Fysikgränd 3, ground floor
Tel 031-772 5473
Last modified: 2009-11-27

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